angstromATE - Imports Recipe and Log Files from Angstrom Engineering Thermal
Evaporator
Package for importing recipe and log files generated by
Angstrom Engineering thermal evaporator systems. These recipe
and log files contain detailed time-series records of chamber
pressure, source activity, deposition rate, film thickness,
tooling parameters, substrate conditions, and other process
variables. `angstromATE` extracts the most useful information
from these files and returns it in a compact, analysis-ready
format.